In March this year, the first installation of the most powerful excimer laser in Central Europe was carried out at the Prague University of Chemical Technology. The Coherent LEAP excimer laser achieves a pulse energy of 1 J at 100 Hz at 248 nm and an energy stability of < 1%. The system also includes beam attenuation and beam output to the optical workbench.

The client required an excimer laser assembly for polymer and semiconductor modification, laser ablation, creating periodic structures on surfaces to enhance biocompatibility or creating structures on semiconductor surfaces, etc. The client also emphasised the ability to attenuate the output pulse energy in the range of 1-100 %, i.e. to be able to apply 1 J or 10 mJ to the sample, which is not a common feature in such a powerful excimer laser model.

We have responded to this challenge by using a primarily industrial high power Coherent LEAP excimer laser with a dual attenuator for the ability to control the output power and energy in the pulse. The output beam is guided through a covered periscope from the laser on the optical workbench to the sample using highly reflective coated mirrors. Ultimately, the biggest challenge in the project was moving the laser, which itself weighs almost 900 kg and has a footprint of 2 x 1 m, plus it had to be moved to an above-ground floor.

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