The Theta-SE spectroscopic ellipsometer with Dual-Rotation technology and a fully automated theta-theta mapping stage enables layer uniformity measurements on samples up to 300 mm in diameter. With the push of a button, you get complete and accurate optical layer properties over the entire measurement area with sub-angstrom sensitivity. Fast and accurate detection is provided by the CCD detector, which allows the entire spectrum (in the range 400-1000 nm) to be measured simultaneously.
Fully autonomous sample positioning, including automatic tilt and height adjustment, allows easy operation and fast measurement of optical properties. The compact design, high measurement speed and reliability of the measured data make the Theta-SE an ideal instrument at an affordable price.
Key Features
- Automated layer uniformity mapping
- 300 mm mapping stage
- Focused optical beam
- Fast and fully autonomous sample alignment
- Compact design
- Affordable price
- Fast, accurate, non-destructive measurement
- Dual-Rotation technology
