Compact nanopositioning linear and scanning axes with piezo drive with sub-nanometer accuracy, a range of motion in the hundreds of micrometers and high-precision guidance with minimal crosstalk. These are all piezo axes from the Flexure series .
The Flexure piezo element movement is based on the elastic deformation of the solid material guide by the piezo element. This eliminates static, rolling or sliding friction.
The result is high rigidity, load capacity and wear resistance. Flexure axes are maintenance-free, can be made of non-magnetic materials, do not require lubricants or other additives and can therefore be used without problems even in a vacuum.
Typical parameters
- X, Y, Z axis positioning and combinations thereof
- Resolution 0.05 - 0.2 nm
- Range of motion 60 to 2000 um
- Load capacity up to 10kg
- Fast dynamic movements (oscillations) possible
- Variants with and without encoders (position measurement)
- Vacuum version
