Zygo 'sVerifire™ VTS is a vertical test station for mounting Verifire™ and DynaFiz™ laser interferometers.
It is a stand-alone UWL (upward-looking) interferometer workstation for stable and robust shape and radius of curvature (ROC) metrology. In addition to measuring spherical optics, it is also suitable for measuring aspheric and free-form optics due to its holographic (CGH) approach with optimized tools for easy and repeatable CGH alignment.
The fully integrated system offers a motorized Z-axis with encoded travel over a 1 meter range, which facilitates positioning of the optics under test while enabling fully automated ROC measurements. The compact footprint requires only the minimum space necessary in the measurement lab.
Vibration resistance
The Verifire™ VTS offers a rigorous mechanical design with an integrated vibration isolation system for stable metrology ensuring trustworthy and reliable measurements. This robust design is perfectly complemented by the patented QPSI™ sensing mode, which is standard on all Zygo interferometers. Precise metrology can thus be achieved even in production environments where vibration is typically present.
Compatibility
The Verifire™ VTS can be fitted with standard Verifire™ 4" interferometers, but also with the higher series of 4" or 6" aperture interferometers, namely the Verifire HD™, Verifire HDX™ and Dynafiz™ models. All of the above interferometers also provide measurements in QPSI™ mode. The aforementioned setup then allows true axial metrology without the data degradation typical of other measurement systems in vibration environments.
Compatibility with standard Zygo interferometer accessories is a matter of course.
Mx™ Software
Zygo's Mx™measurement and analysis software offers a wide range of functions together with flexible configurability, allowing both adaptation for a specific user application with simple operation (on-button system) and the creation of high-end applications in R&D laboratories. New features such as SmartAveraging®, Custom Workspace and an integrated scripting language(Python™) further simplify the full use of the system and significantly extend the interferometer functionality according to the requirements of the specific application.
