Types of drives
- Stepper motors (L series)
- DC servo motors (L series)
- Linear magnetic motors (V series)
Types of position measurement
- No position measurement
- Rotary encoder on servo motor (indirect metering)
- Direct incremental encoder
Typical parameters
- Positioning range in two axes from 102 x 102 mm to 305 x 305 mm
- Bidirectional repeatability up to ± 0.25 µm
- Load capacity up to 20 kg
- Variants with internal aperture
- Variants for vacuum