The extremely stable NPP-1 planar positioning platform from Sios Messtechnik is primarily designed for mounting an AFM (or other type of sensor). It is a platform with a large range and precise interferometric position measurement. The platform can be fitted with virtually any type of sensor that requires stable, repeatable and accurate sample positioning.
Key features
- 2.5-D positioning and measuring system with highest accuracy and stability
- Measuring and positioning range: Ø 100 mm
- Lateral measurement resolution ≤ 0.02 nm
- Control: 3 differential laser interferometers
- Metrological repeatability due to stabilized HeNe lasers
- Open device architecture allows the use of customized sensors (typically AFM)
- User interface: Sios Software/API interface
Typical applications
- Nanopositioning, nanomanipulation, nanostructuring
- Processing and measurement of microelectronic and micromechanical components
- Measurement of optics, microsystem technology with nanometer precision over large spatial scales
- continuous AFM scanning over large areas