In the autumn of 2016, we delivered the NewView NV8300 series optical interference profilometer for precise 3D measurement of surface structure and shape. The system is manufactured by Zygo. The system will be used for surface evaluation of defined stressed parts with evaluation of the resulting wear in 2D and 3D (profile, shape, volume including related parameters).
The NV8300 operates on the principle of white light interference on the surface of the sample(Coherent Scanning Interferometry, or Phase Shifting Interferometry) and thus allows non-contact measurement of the exact structure, shape or roughness of the surface with nanometer accuracy and repeatability. Both micro and macro areas can be measured in the order of units to hundreds of mm, using a motorised stage and image stacking of individual measurements.
Parameters:
- Vertical scan range: 150 um in precision mode with 20 mm piezoscanner in extended mode
- Measurement repeatability: 0.01 nm
- Optical lateral resolution: 340 nm (100X objective)
- Sampling lateral resolution: 40 nm (100X objective 2X zoom)
- Available lenses: 1X, 2X, 2.75X, 5.5X, 10X, 20X, 50X, 100X standard, LWD, SLWD Zoom optics: 0.5X, 0.75X, 1.0X, 1.5X, 2.0X
- The instrument can measure transparent, opaque materials, coated or uncoated samples, smooth, rough and polished samples with reflectance from 0.05% to 100%.
