STACIS® 4 is the most advanced active vibration isolation system available on the market. STACIS uses inertial vibration sensors, sophisticated control algorithms and state-of-the-art piezoelectric actuators to suppress vibration in real time by continuously measuring floor activity and then expanding and contracting the piezoelectric actuators to filter out floor movement. The all-new STACIS 4 builds on the success of our proven STACIS technology, which is used by 9 of the 10 largest semiconductor manufacturers in the world.
Key Features
- STACIS is hundreds of times stiffer than air isolators and suffers none of the limitations of air vibration isolation systems.
- Active bandwidth from 0.2 Hz to 150 Hz and unmatched active isolation with up to 99.9% vibration reduction at 2 Hz.
- Robust series construction allows set it and forget it, unlike competing parallel designs which are inherently unstable and require frequent tuning to maintain peak performance.
- STACIS 4 allows for two-stage vibration control designs incorporating passive or active parallel platforms above the STACIS system.
- The performance of the STACIS 4 system is equivalent to a reduction in vibration environment of up to 5 VC curves on a stable floor.