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Stacis 4 Active Anti-Vibration Platform

STACIS® 4 is the most advanced active vibration isolation system available on the market. STACIS uses inertial vibration sensors, sophisticated control algorithms and state-of-the-art piezoelectric actuators to suppress vibration in real time by continuously measuring floor activity and then expanding and contracting the piezoelectric actuators to filter out floor movement. The all-new STACIS 4 builds on the success of our proven STACIS technology, which is used by 9 of the 10 largest semiconductor manufacturers in the world.

Key Features

  • STACIS is hundreds of times stiffer than air isolators and suffers none of the limitations of air vibration isolation systems.
  • Active bandwidth from 0.2 Hz to 150 Hz and unmatched active isolation with up to 99.9% vibration reduction at 2 Hz.
  • Robust series construction allows set it and forget it, unlike competing parallel designs which are inherently unstable and require frequent tuning to maintain peak performance.
  • STACIS 4 allows for two-stage vibration control designs incorporating passive or active parallel platforms above the STACIS system.
  • The performance of the STACIS 4 system is equivalent to a reduction in vibration environment of up to 5 VC curves on a stable floor.
Petr Březina
Expert advisor

Ing. Petr Březina

+420 607 014 272

brezina@optixs.cz

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Popis produktu

Originally designed for isolating precision microlithography, metrology and inspection equipment in modern semiconductor fabs, STACIS is now the standard solution for the most sensitive instruments in busy environments, including applications such as failure analysis, nanotechnology research, nanofabrication, structural biology and materials research.

STACIS 4 includes a new and improved DC-2020 digital controller with lower noise and a dual-core processor. This new advanced control system provides the user with an easy-to-use graphical user interface (GUI) accessible via a web interface.

STACIS 4 builds on the advanced architecture of previous generations and adds advanced control algorithms and new patented technologies. The result is previously unattainable vibration suppression of building floors at all frequencies, but especially below 10 Hz where high-resolution imaging and metrology is most sensitive. Combined with patented FloorSense™ technology, STACIS 4 reduces building floor vibration by 60 dB at 2 Hz and 27 dB at 1 Hz. Full STACIS 4 performance specifications are listed below.

Payload of 4500 lbs (2045 kg) tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS) in the vertical and horizontal axes.

Parameters

Degrees of freedom (number of active axes) 6
Active frequency band isolation 0.2 Hz - 150 Hz
Isolation efficiency at 1 Hz 85% - 96%
Isolation efficiency at 2 Hz 96-99,9%
Settling time (typical) 0.02 sec
Internal system noise <0.05 nm RMS
Load range per insulator

Low load: 182-500 kg

Medium load: 410-955 kg

High load: 864-2045 kg

Stiffness (454 kg load, medium load insulator) 73 x105 N/m
Magnetic field emitted at a maximum distance of 102 mm from the insulator <0.02 µG broadband RMS

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Expert advisor

Petr Březina

Ing. Petr Březina