The SP-TR three-beam interferometer from SIOS uses three laser beams for precise, simultaneous measurement of pitch and yaw and position, primarily for calibrating positioning systems on machine tools, CMMs and other linear guides with precision requirements.
The interferometer uses three measurement beams of a stabilized HeNe laser to simultaneously measure position at three different points, and thus can be used to calculate linear line straightness, tilt, or position independent points.
The interferometer thus enables the measurement of line straightness (including the determination of angular deflections) according to DIN ISO 230-1 in a single measurement and without any adjustments.