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KLA Instruments

iNano® Nanoindenter

The iNano® Nanoindenter facilitates the measurement of thin layers, coatings, and small volumes of materials. This accurate, flexible, and user-friendly instrument performs a wide range of mechanical tests at the nanoscale, including indentation, hardness measurement, scratch tests, and universal testing.

Key features

  • InForce 50 actuator (50 mN, 50 µm) with capacitive displacement detection and electromagnetic excitation
  • Integrated tip calibration system for fast and accurate calibration
  • InQuest electronics with 100 kHz data acquisition speed and 20 µs time constant
  • XY motion system with magnetic sample holder
  • Integrated microscope with digital zoom for precise indentation targeting
  • ISO 14577 and standardized test methods
  • InView software (RunTest, ReviewData, InFocus reporting, InView University, InView Mobile)
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

Send inquiry

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
What else we can help with

Product description

The iNano® Nanoindenter uses the InForce 50 actuator to perform nanoindentation and universal nanomechanical tests. The force range of 50 mN and travel range of 50 µm allow it to cover a wide range of applications.

The system is compact and includes a high-speed InQuest control unit and a vibration-isolated design. Thanks to InView software, nanoscale testing is easy and flexible. iNano can be expanded with optional modules such as sample heating, continuous stiffness measurement (CSM), NanoBlitz 3D/4D property mapping, and remote video.

A wide range of materials can be tested, including metals, ceramics, composites, thin films, coatings, polymers, biomaterials, and gels.

Applications

  • Hardness and elastic modulus measurements (Oliver-Pharr)
  • Characterization of thin layers (hardness, modulus, delamination, fracture, crack propagation)
  • High-speed maps of material properties (NanoBlitz Topography, Tomography)
  • Hardness tests according to ISO 14577
  • Measurement of tan δ, storage modulus, and loss modulus of polymers
  • Nanoindentation at high temperatures

Industry

  • Semiconductor and packaging industry
  • Universities, research laboratories, and institutes
  • Polymers and plastics
  • MEMS – microelectromechanical systems
  • Ceramics and glass
  • Biomaterials and pharmaceutical materials
  • Coatings and varnishes
  • Polymer production
  • Composites

Parameters

  • Force range: 50 mN
  • Displacement range: 50 µm
  • Stage movement range: 100 mm (X, Y axes), 25 mm (Z axis)
  • Data acquisition speed: 100 kHz
  • Time constant: 20 µs
  • Feed resolution: TO BE ADDED
  • Sample range: from ultra-soft gels to hard coatings

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

tel: +420 601 123 593
mail: schuster@optixs.cz