KLA Instruments
KLA Instruments is an American manufacturer of high-end surface metrology systems for research laboratories in academia and industry. It offers an extensive portfolio of profilometers, nanoindenters, thin film thickness and thin film resistivity instruments.
www.kla.comProducts
- Nanoindenters for mechanical property testing
- Filmetrics® instruments for thin film measurement
- Tencor® contact profilometers
- Instruments for thin film resistivity measurements
Applications
- Thin film characterization
- Surface topography
- Development and research
- Microelectronics and photovoltaics