KLA Instruments

Alpha-Step® D-500 Stylus Profiler

The Alpha-Step® D-500 is a stylus profilometer capable of measuring 2D step heights from a few nanometers to 1200 µm. It also supports 2D measurements of roughness, curvature, and stress in thin films. It is equipped with a manual stage (140 mm) and advanced optics with a high-resolution color camera.

Alpha-Step® D-600 Stylus Profiler

The Alpha-Step® D-600 is a stylus profilometer capable of measuring 2D and 3D step heights from a few nanometers to 1200 µm. It also supports the measurement of roughness, curvature, and stress in thin films. It is equipped with a motorized stage for samples up to 200 mm and advanced optics with a high-resolution color camera.

Tencor® P-17 & Tencor® P-17 OF

The Tencor® P-17 is an 8th generation tabletop stylus profilometer capable of measuring step heights from a few nanometers to 1 mm. It offers 2D and 3D measurement of height, roughness, curvature, and stress of thin films up to 200 mm in diameter without stitching.

Tencor® P-7 Stylus Profiler

The Tencor® P-7 is a benchtop stylus profilometer with a step height measurement range from a few nanometers up to 1 mm. It supports 2D and 3D measurements of height, roughness, curvature, and stress without the need for image stitching for scans up to 150 mm.

Filmetrics® F40

Filmetrics® F40 turns your microscope into a thin film measurement tool. It allows you to measure thickness, optical constants, and reflectivity in seconds, with a measurement spot size of up to 1 µm, suitable for structured, curved, and non-homogeneous samples.

iMicro® Nanoindenter

The iMicro® Nanoindenter is a precise and flexible instrument for testing mechanical properties at the nanoscale. It enables nanoindentation, hardness measurement, scratch testing, and universal nanomechanical testing. Thanks to interchangeable actuators, it covers a wide dynamic range of force and displacement—from soft polymers to hard metals and ceramics.

iNano® Nanoindenter

The iNano® Nanoindenter facilitates the measurement of thin layers, coatings, and small volumes of materials. Accurate, flexible, and user-friendly, the instrument performs a wide range of mechanical tests at the nanoscale—including indentation, hardness measurement, scratch testing, and universal testing.

Nano Indenter® G200X

The Nano Indenter® G200X is an easy-to-use nanoscale mechanical property tester that quickly provides accurate and quantitative results. It allows testing of a wide range of samples, from hard coatings to soft polymers, and offers the most comprehensive set of tests in KLA Instruments' nanoindenter product line.

Filmetrics® F54-XY-200 and F54-XY-300

The Filmetrics® F54-XY series provides automated mapping of thin film thickness, refractive index, reflectivity, absorption, and surface roughness on samples up to 300 mm.

Filmetrics® F54

Filmetrics® F54 combines the microscopic measurement spot size of the F40 instrument with an integrated camera and automated sample mapping up to 450 mm diameter using an R-Theta stage and advanced spectral reflectance system.

Filmetrics® F20

Filmetrics® F20 is a thin film analysis instrument that measures the thickness and optical properties of materials ranging from 1 nm to 3 mm. The device works on the principle of light interference on thin films and multilayers.