Optical 3D profilometer based on WLI/CSI from leading American manufacturer Zygo Inc. (Ametek).
It is a white-light interferometric 3D microscope assembly with phase shifting interferometry capability to achieve sub-angstrom repeatability for any field of view (Z-axis resolution is independent of objective magnification).
The setup is used to measure virtually any surface, the instrument is extremely simple to operate and allows complete measurements at the touch of a button.
The evaluation can be performed in 3D data or in arbitrary 2D sections (circular or straight sections). Of course, the measured surface can be exported to a 3D model.
The supplied assembly includes an integrated anti-vibration plate and, thanks to optimized measurement modes, achieves extremely high repeatability and measurement accuracy in the most demanding conditions, right on the production floor at the machine tool.
Device parameters
- Sample positioning: motorised 5-axis XYZRP table
- Field of view stitching: YES
- Surface topography repeatability: < 0.08 nm
- SW: State-of-the-art Mx™ software developed to meet the needs of surface measurement and analysis
