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Probes for RF frequency detection

Probes for RF frequency detection, real-time duty cycle measurement, average power, voltage, current, plasma discharge impedance and RF pulse monitoring from Impedans. There are six products to choose from in the portfolio - Octiv Mono 2.0, Octiv Poly 2.0, Octiv Suite 2.0, RF Spectrometer Modules, RF Event Detector Modules and Alfven | Plasma Arc Detector | Pulsed RF Monitoring.

Impedans

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Ing. Martin Klečka

+420 607 014 278

klecka@optixs.cz

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Products

Octiv Mono 2.0

RF power meter, directional power sensor and impedance analyzer. The system measures one fundamental frequency and has a NIST accuracy of 1%. It is an in-line sensor used to verify RF output power from RF generators, to match the impedance range and efficiency of the unit, and for general power meter measurements.

Key Features:

Automatic switching between CW and Pulsed RF monitoring in Time Average Mode (TAM).
Reports pulse frequency and duty cycle with sub-micron accuracy in TAM.
Time resolved mode with 1 microsecond resolution for detailed waveform analysis.
2 application options: stand-alone or integration with any software platform using Impedans communication protocol.

Octiv Poly 2.0

Multi-frequency in-line RF system for voltage, current and phase measurement with network communication (Ethernet, EtherNet/IP or EtherCAT). Suitable for efficient troubleshooting of problems such as endpoint detection errors and redundant preventive maintenance.

Key Features:

Choice of 5 frequencies within a single sensor with up to 15 harmonics on each frequency.
Unmatched performance accuracy up to 50 Ω and non-50 Ω load impedance due to advanced calibration with 1% accuracy.
Sensor repeatability <0.1%.
Frequency monitoring with up to ±10% fundamental frequency as standard, with the ability to accommodate intermodulation frequency monitoring.

Octiv Suite 2.0

One of the most sophisticated RF sensors on the market for in-line power and impedance measurement, with unmatched accuracy and functionality. It is a non-invasive, in-line sensor designed to monitor all RF power parameters such as ion flux.

Key Features:

Choice of 5 frequencies within a single sensor with up to 15 harmonics at each frequency.
Unparalleled power accuracy up to 50 Ω and non-50 Ω load impedance due to advanced calibration with 1% accuracy.
Sensor repeatability <0.1%
Single and multi-frequency voltages with waveform display.
Ion flux monitoring provides direct correlation with etch and deposition rates.
2 application options: stand-alone or integration with any software platform using Impedans communication protocol.

RF Spectrometer modules

A radio frequency (RF) detector that directly monitors harmonic frequencies generated by the plasma. It is designed to detect endpoint and product failures such as chamber leakage, wafer drift, and other serious plasma failures.

Key Features:

Choice of 5 frequencies within a single sensor with up to 15 harmonics at each frequency.
Fully non-invasive - system integration is possible without the need for modifications to existing systems.
USB, Ethernet, EtherCAT with easy API and FDC integration.

RF Event Detector modules

Sophisticated all-in-one diagnostic system for plasma arc detection and RF pulse monitoring. The system architecture enables real-time processing of RF measurements with microsecond resolution. It is designed to simultaneously detect and characterize plasma arcs, monitor each RF pulse, and verify that each pulse meets predefined specifications.

Key Features:

1 μs resolution for plasma arcs and atypical pulses (with customizable noise filter).
Customizable widgets for plasma arc and pulse classification.
Monitoring of duty cycle, pulse frequency and cycle of each pulse.
Reporting of deviations from user-defined specifications.
ON-OFF and multi-level pulsing (up to 3 levels).
Maximum, minimum and average current and voltage reporting during pulses.

Alfven | Plasma Arc Detector | Pulsed RF Monitoring

Key Features:

1 μs resolution for plasma arcs and atypical pulses (with customizable noise filter).
Customizable widgets for plasma arc and pulse classification.
Monitoring of duty cycle, pulse frequency and cycle of each pulse.
Reporting of deviations from user-defined specifications.
ON-OFF and multi-level pulsing (up to 3 levels).
Maximum, minimum and average current and voltage reporting during pulses.

Dokumenty

Probes for RF frequency detection

OptiXs care

Products

Octiv Mono 2.0

Key Features:

Octiv Poly 2.0

Key Features:

Octiv Suite 2.0

Key Features:

RF Spectrometer modules

Key Features:

RF Event Detector modules

Key Features:

Alfven | Plasma Arc Detector | Pulsed RF Monitoring

Key Features:

Dokumenty

ModuliRFevent_BR-0014-02

Moduli_DS-0009-02-Compressed

ModuliRFspec_BR-0009-03

Octiv-Suite_DS-0003-07

OctivSuite_BR-0003-09

Octiv-Poly_DS-0002-06

OctivPoly_BR-0002-09

OctivMono_BR-0001-11

Octiv-Mono_DS-0001-05

Alfven_DS-0004-02

Alfven_BR-0004-06

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