Impedans
Impedans specializes in the manufacture of plasma discharge characterization products. Impedans' systems find applications in basic research, development, device design, process control, fault detection and classification (FDC) in many industries, from semiconductor industry, vacuum coating, medical device manufacturing or aerospace.
www.impedans.comProducts
- Probes for RF frequency detection, real-time duty cycle measurement, average power, voltage, current, plasma discharge impedance and RF pulse monitoring - e.g. Octiv probes
- Probes for measuring key physical parameters of bulk plasma such as plasma potential, charged particle density (electrons & ions) and electron temperature - all of which indicate the behaviour of the plasma in the actual process such as deposition etc - e.g. Langmuir probes, Plato
- Probes for measuring the process on the substrate surface - real-time measurement of the ion flux and energy distribution function of ions hitting the surface using a simulated substrate with integrated sensors, possibly in combination with an integrated quartz crystal microbalance (QCM), which is used to measure the ion energy distribution function and the ratio of ion-neutral deposition on the surface inside the plasma reactor - e.g. Semion, Vertex or Quantum systems
Usage
- semiconductor industry
- vacuum coating
- medical device manufacturing
- aerospace