We distribute this product only in the Czech Republic and Slovakia.
Alpha-Step® D-500 Stylus Profiler
Alpha-Step® D-500 Stylus Profiler Alpha-Step® D-500 Stylus Profiler Alpha-Step® D-500 Stylus Profiler Alpha-Step® D-500 Stylus Profiler
KLA Instruments - Logo
KLA Instruments

Application areas:

Measurement of step height, roughness, curvature, and stress of thin films in research and production environments

Alpha-Step® D-500 Stylus Profiler

The Alpha-Step® D-500 is a stylus profilometer capable of measuring 2D step heights from a few nanometers to 1200 µm. It also supports 2D measurements of roughness, curvature, and stress in thin films. It is equipped with a manual stage (140 mm) and advanced optics with a high-resolution color camera.

Key features

  • Step height measurement range: from nanometers to 1200 µm
  • Low force: 0.03–15 mg
  • 5MP high-resolution color camera
  • Keystone correction – elimination of distortion from side optics
  • Arc correction – elimination of errors caused by arc movement of the tip
  • Smallest dimensions among desktop stylus profilometers
  • User-friendly software
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

Send inquiry

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
What else we can help with

Product description

Alpha-Step® D-500 supports 2D measurement of step height, roughness, curvature, and stress. Innovative optical lever technology ensures high measurement resolution, a large vertical range, and low measuring force.

The advantage of the stylus method is direct measurement, independent of material properties. Adjustable force and tip selection allow accurate measurements of a wide range of structures and materials. This makes it possible to quantify the amount of material deposited or removed and changes in structure by measuring roughness and stress.

The system is designed for universities, research laboratories, and manufacturing environments and is used in the semiconductor industry, LED manufacturing, solar energy, MEMS, automotive, and medical industries.

Applications

  • Step Height: 2D and 3D measurement of step height (nanometers – 1200 µm), quantification of material after etching, sputtering, SIMS, deposition, spin coating, CMP, etc. processes.
  • Texture: 2D and 3D roughness and waviness measurement; calculation of parameters such as RMS roughness.
  • Form: measurement of surface curvature (2D), e.g., wafers or lenses.
  • Stress: measurement of thin film stress (2D) based on changes in surface curvature; calculation using Stoney's equation.

Industry

  • Universities, research laboratories, and institutes
  • Semiconductor and compound semiconductor industry
  • LEDs (light-emitting diodes)
  • Solar technology
  • MEMS – microelectromechanical systems
  • Automotive industry
  • Medical devices

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

tel: +420 601 123 593
mail: schuster@optixs.cz