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KLA Instruments

Areas of application:

Measurement of step height, roughness, curvature, and stress of thin films in research and production environments

Alpha-Step® D-600 Stylus Profiler

The Alpha-Step® D-600 is a stylus profilometer capable of measuring 2D and 3D step heights from a few nanometers to 1200 µm. It also supports the measurement of roughness, curvature, and stress in thin films. It is equipped with a motorized stage for samples up to 200 mm and advanced optics with a high-resolution color camera.

Key features

  • Step height range: from nanometers to 1200 µm
  • Low force: 0.03–15 mg
  • 5MP high-resolution color camera
  • Keystone correction – elimination of distortion from side optics
  • Arc correction – elimination of errors caused by arc movement of the tip
  • Compact system size
  • User-friendly software
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

Send inquiry

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
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Product description

Alpha-Step® D-600 enables 2D and 3D surface measurements – step height, roughness, curvature, and thin film stress. Innovative optical lever technology provides high measurement resolution, a large vertical range, and the ability to measure with low force.

The advantage of the stylus method is direct measurement independent of material properties. Adjustable force and a choice of tips enable accurate measurements of a wide range of structures and materials. This makes it possible to quantify the amount of material deposited or removed, as well as changes in structure, by measuring roughness and stress.

Applications

  • Step Height: 2D and 3D measurement of step height (nanometers – 1200 µm), quantification of material after etching, sputtering, SIMS, deposition, spin coating, CMP, etc. processes.
  • Texture: 2D and 3D roughness and waviness measurement; calculation of parameters such as RMS roughness.
  • Form: measurement of surface curvature (2D), e.g., wafers or lenses.
  • Stress: measurement of thin film stress (2D) based on changes in surface curvature; calculation using Stoney's equation.

Industry

  • Universities, research laboratories, and institutes
  • Semiconductor and compound semiconductor industry
  • LEDs (light-emitting diodes)
  • Solar technology
  • MEMS – microelectromechanical systems
  • Automotive industry
  • Medical devices
  • And more (upon request)

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

tel: +420 601 123 593
mail: schuster@optixs.cz