Laser Fizeau interferometer Verifire 6" from leading American manufacturer Zygo Inc. (Ametek) with anti-vibration table from TMC (Ametek).
This is a precision phase shifting laser interferometer assembly with reference optics with better than lambda/20 (PVr, @633 nm) surface quality and an optical table for vibration isolation.
A vibration and airflow resistant QPSI measurement mode is included, optimal for production floor environments.
The setup is used for measuring planar, spherical optics as well as for measuring the quality of large format, precision machined metal parts. It allows comparison with model data for subsequent production optimization. It is also possible to export and import data for optical simulations (e.g. using Zemax software) and to compare the difference between the model of the measured part and the real measured results.
Of course, a motorized continuously adjustable optical zoom 1x - 5x is available.
Device parameters
- Laser source: Stabilized HeNe, 632.8 nm, extended warranty, manufacturer: Zygo
- Measuring beam diameter: 4" (100 mm)
- Optical zoom: continuous 1x - 5x, motorized
- SW: State-of-the-art Mx™ software developed to meet the needs of optical surface measurement and analysis using optical interferometry