The RC2 spectroscopic ellipsometer from J.A. Woollam with its new Dual RCE(Rotating Compensator Ellipsometry) technology enables fast and highly accurate measurements of a wide range of materials such as organic materials, dielectrics, semiconductors and metals. It is a microfocusing ellipsometer in PCSCA(Polarizer-Compensator-Sample-Compensator-Analyzer) configuration. With Dual RCE technology, the RC2 measures continuously (no singular points) and with high sensitivity over the entire ellipsometric range.
It is used to characterize thin films with microstructures or planar inhomogeneities, to determine layer thickness, optical properties, complex refractive index, absorption coefficient, and more.
The system is available in two spectral ranges: 193-1000 nm and 193-1500 nm. The complete spectrum is scanned simultaneously, on the order of tens to units of seconds (depending on data averaging). In both variants with a fixed angle of incidence of 65°.
Key features
- The most accurate CCD-based ellipsometer
- Measurement of the complete Mueller matrix
- Dual RCE technology with two rotating compensators
- Spectral range up to 193 - 1500 nm with simultaneous detection of the entire spectrum
- Measurement footprint size 25 µm x 40 µm
The RC2 series ellipsometers are equipped with a fully automated data acquisition system. Motorized positioning which allows automatic mapping of the microfocused sample to a 25 µm x 40 µm (or optional 25 µm x 60 µm) footprint size.
