The RC2 spectroscopic ellipsometer from J.A. Woollam with its new Dual RCE(Rotating Compensator Ellipsometry) technology enables fast and highly accurate measurements of a wide range of materials such as organic materials, dielectrics, semiconductors and metals. It is a modular system in a PCSCA(Polarizer-Compensator-Sample-Compensator-Analyzer) configuration. With Dual RCE technology, the RC2 measures continuously (no singular points) and with high sensitivity over the entire ellipsometric range.
It is used to characterize thin films and determine optical properties of materials such as complex refractive index and absorption coefficient.
The wide spectral range with variable measurement angle allows characterisation of even multilayer structures.
Key features
- The most accurate CCD-based ellipsometer
- Measurement of the complete Mueller matrix
- Modular design
- Flexible system integration
- Dual RCE technology with two rotating compensators
- Widest spectral range with simultaneous full spectrum detection
- Measurement capability in both in situ and ex situ configurations
RC2 series ellipsometers are equipped with a fully automated data acquisition system and a motorized workbench that allows sample mapping and layer characterization (homogeneity, roughness, phase transitions, ...).
