In August 2021 we installed a Microwriter ML3 Pro from the British manufacturer Durham Magneto Optics Ltd. (DMO) for the Institute of Analytical Chemistry, CAS. One of the main applications is the creation of structures for microfluidics.
It is an assembly with selectable resolution in the range of 0.6 µm to 5 µm, with a high-precision positioning system.
The illumination source with a 365 nm wavelength and high optical power is optimal for i-line photoresist, but also allows writing on conventional g-line and h-line photoresist.
Temperature stabilization ensures maximum stability even for longer recording tasks (typically for combinations of high resolution and large area, or depth recording over a large area - typical for microfluidics).
The integrated profilometer function allows, among other things, verification of the write after structure recall.
The Virtual Mask Aligner (VMA) function for precise alignment of the write to existing structures serves for accurate and easy micro-contacting. In addition, the Microwriter ML3 also allows grayscale writing.
Device parameters
- Source wavelength: 385 nm
- Temperature stabilization: ± 0.25 °C
- Writing resolution: 600 nm, 1000 nm, 2000 nm and 5000 nm
- Number of lenses: 4 (3x to 20x magnification)
- Additional features: VMA, wide field viewer, integrated profilometer, autofocus, focus lock, virtual rotation, auto sample centering, auto edge detection, auto marker recognition.
