Laser Fizeau interferometer Verifire 6" from leading American manufacturer Zygo Inc. (Ametek) with anti-vibration table from TMC (Ametek). This is a precision phase shifting laser interferometer assembly, with reference optics with better than lambda/40 surface quality (PVr, @633 nm), and an optical table for vibration isolation. The set-up is used for measurements of planar and spherical optics as well as for measurements of complex optical systems. It allows measurement of wavefront deformation, higher order optical aberrations and their comparison with model data for subsequent production optimization. It is also possible to export and import data for simulation (e.g. using Zemax software) and comparison of the difference between the model of the measured part and the real measured results. Of course, the QPSI mode enables very precise measurements even in turbulent conditions, or for example the motorized continuously adjustable optical zoom 1x - 5x. The supplied anti-vibration table assembly is specially adapted for correct operation in clean rooms.
Equipment parameters
- Laser source: Stabilized HeNe, 632.8 nm, extended warranty, manufacturer: Zygo
- Measuring beam diameter: 6" (150 mm)
- Optical zoom: 1x - 5x continuous, motorized
- SW: State-of-the-art Mx™ software developed to meet the needs of optical surface measurement and analysis using optical interferometry
