VASE® is a range of accurate, versatile and reliable spectroscopic ellipsometers from the American manufacturer J. A. Woollam for research on all types of materials. It is optimized for measurements in the Brewster angle region thanks to the combination of RAE and patented AutoRetarder technology. It can handle semiconductors, dielectrics, polymers, metals and multilayers.
In addition to its high measurement accuracy, it excels in its wide variability and spectral range - from 193 to 4000 nm.
The adjustable wavelength and angle of incidence allow flexible measurements in the following areas, among others:
- Reflection and transmission ellipsometry
- Generalized ellipsometry (Anisotropy, Retardance, Birefringence)
- Intensity measurements: reflectance (R) and transmittance (T)
- Cross-polarization (R/T)
- Depolarization
- Optical scatterometry
- Mueller matrix