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KLA Instruments

iMicro® Nanoindenter

The iMicro® Nanoindenter is a precise and flexible instrument for testing mechanical properties at the nanoscale. It enables nanoindentation, hardness measurement, scratch testing, and universal nanomechanical testing. Thanks to interchangeable actuators, it covers a wide dynamic range of force and displacement – from soft polymers to hard metals and ceramics.

Key features

  • InForce 1000 actuator for nanoindentation and nanomechanical testing
  • Optional InForce 50 actuator (max. 50 mN) for soft materials
  • Optional Gemini 2D sensor for two-axis dynamic measurements
  • Integrated tip calibration for fast and accurate results
  • InQuest electronics with 100 kHz data acquisition rate and 20 µs time constant
  • XY motion system with magnetic sample holder
  • Robust construction with vibration isolation
  • Integrated microscope with digital zoom
  • Standardized test methods (ISO 14577)
  • InView software with RunTest, ReviewData, InFocus, InView University, and InView Mobile modules
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

Send inquiry

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
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Product description

The iMicro® Nanoindenter is a compact system equipped with an InForce 1000 actuator for testing hard materials and the option of adding an InForce 50 actuator for softer materials. The optional Gemini 2D sensor enables two-axis dynamic measurement.

The system is equipped with high-speed InQuest electronics (100 kHz) and a vibration-isolated design. The InView software package facilitates testing, includes predefined methods according to ISO 14577, and provides tools for analysis and reporting.

iMicro is suitable for a wide range of materials – from metals and alloys, ceramics and glass, through composites, polymers and biomaterials, to coatings, gels and pharmaceutical materials.

Typical applications

Measurement of the elastic modulus of hard coatings, thin layers, and small volumes of materials.

Applications

  • Measurement of coating hardness and elastic modulus (Oliver-Pharr)
  • High-speed maps of material properties (NanoBlitz 3D/4D)
  • Determination of yield stress/strain
  • Hardness tests according to ISO 14577
  • Measurement of tan δ, storage modulus, and loss modulus of polymers
  • Quantitative scratch and wear tests
  • Nanoindentation at high temperatures
  • Universal mechanical testing at the nanoscale (compression, tension, creep, stress relaxation, fatigue)

Industry

  • Semiconductor industry
  • Universities, research laboratories, and institutes
  • PVD/CVD hard coatings (DLC, TiN)
  • Batteries and energy storage systems
  • MEMS – microelectromechanical systems
  • Ceramics and glass
  • Metals and alloys
  • Pharmaceutical materials
  • Coatings and varnishes
  • Composites
  • Automotive and aerospace industries

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

tel: +420 601 123 593
mail: schuster@optixs.cz