Laser system for micromachining

Laser system with ultra-short pulses for laser texturing and micromachining of material surfaces and development of measurement systems for these laser processes. A complete and functional system of modular design shall consist of a femtosecond pulsed laser in an industrial design, a fast scanning head, an optical anti-vibration table, a motorized positioning system and the necessary accessories. The delivery shall include the assembly of all components on the optical table, the tuning of the optical path through the optical elements and the scanning head and the demonstration of the full functionality of the system by texturing and micromachining of several samples.

The customer is the Process Thermomechanics Department and the Laser Micromachining Laboratory. These departments are currently working on the research topics "Thermal diagnostics of pulsed laser micro-machining" and "Thermal properties of surfaces and thin films".

The basis of our designed system is a pneumatic anti-vibration table, on which is placed a femtosecond laser Coherent Monaco whose output is fed into a protective box in which is placed a granite frame carrying the necessary optical elements and scanning head, which from top to bottom is directed into the sample area with a three-axis positioning system. The whole assembly is controlled by a control computer.

The laser micromachining station allows

• 1 to 4 MHz repetition rate change, up to 50 MHz without AOM
• Pulse length adjustment 350 fs to 10 ps
• changing beam polarization
• adding additional features such as tracking through the scanning head

Laser Coherent Monaco

• Output at 1035 nm
• Medium power 40 W
• Burst mode capability
• Designed for 24/7 operation in the harshest environments

XYZ positioning system

• Positioning range 205 mm vertically, 155 x 55 mm horizontally
• Total vertical load capacity 20 kg
• Total positioning accuracy ±10 μm

Robust optical table

• Top plate dimensions 1800 x 900 x 200 mm
• Material 430 ferromagnetic stainless steel
• Metric hole network with M6 threads with 25 mm pitch
• Top plate flatness ±0.13 mm over the entire length of the table