The LM series contact probe gauge from SIOS with interferometric measurement is used for precise dimensioning and calibration of standards (measuring blocks).
The primary use of the LM series gauges is the calibration of plan-parallel blocks for precision measurement (block size range: 0.5 mm to 100 mm). Measurement is in accordance with ISO 3650. However, secondary applications may include, for example, thickness measurements of optical elements (e.g. lenses), thin films and silicon wafers.
