Probes from Impedans to measure key physical parameters of the bulk plasma, such as plasma potential, charged particle density (electrons & ions) and electron temperature - all of which indicate the behaviour of the plasma in the actual process, such as deposition etc. There are 2 probes in total - the Langmuir probe and the Plato probe.
We distribute this product only in the Czech Republic and Slovakia.
Probes for measuring key physical parameters of bulk plasma
OptiXs care
- We will expertly consult your planned application
- Our team is able to integrate the product into a larger system
- We ensure fast delivery of spare parts and local service
