The M-2000 Series Spectroscopic Ellipsometer from J.A. Woollam is a modular instrument utilizing groundbreaking rotating compensator (RCE) technology for high accuracy and CCD detection for unmatched measurement speed. This series is widely used for characterization of thin films, their optical properties and thickness.
The groundbreaking RCE(Rotating Compensator Ellipsometry) technology for high precision measurements combined with a fast CCD detector enables measurements on a wide range of materials such as dielectric, organic, semiconducting materials and metals. The wide spectral range (up to 193-1690nm) with variable measurement angle allows the analysis of even multilayer structures. The modularity of the system allows, among other things, the use of the ellipsometer in in situ and ex situ mode. Very fast data measurement - complete data series from the entire spectrum within seconds.
Key features
- Breakthrough RCE technology - speed and accuracy
- Modular design
- Ex-situ and in-situ configurations
- Flexible system integration
- Wide spectral range
- Fast measurement of the entire spectrum at once thanks to CCD detector
- Highly accurate measurements on a wide range of materials
- Comprehensive software with the widest range of analytical models on the market
- Easy alignment thanks to integrated quadrant detector
The M2000 series ellipsometers are equipped with a fully automated data acquisition system and a motorized workbench that allows 2D mapping of the sample and evaluation of not only layer quality but also layer uniformity.
