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Filmetrics® F40

Filmetrics® F40 turns your microscope into a thin film measurement tool. It allows you to measure thickness, optical constants, and reflectivity in seconds, with a measurement spot size of up to 1 µm, suitable for structured, curved, and non-homogeneous samples.

Key Features

  • Measurement spot size down to 1 µm
  • Integrated live view camera with microscope optics
  • Intuitive FILMeasure software included as standard
  • Complete set of accessories included in the package
  • Patented thickness imaging technology for reliable and cost-effective metrology
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

Send inquiry

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
What else we can help with

Product description

Filmetrics® F40 includes an integrated live-view camera connected to microscopic optics, enabling a measurement spot size of up to 1 µm. This makes it suitable for measuring structured, curved, and non-homogeneous samples.

The system includes FILMeasure analytical software and a complete set of accessories that enable intuitive analysis and reliable results across a wide range of applications. Typical applications include integrated circuit failure analysis, measurement of ITO/TCO layers, coatings for medical applications, OLED displays, porous silicon, and semiconductor process layers.

Patented thickness imaging technology enables easier setup, fewer recipes, more robust pattern recognition, and lower costs than conventional thin film metrology tools. Both standalone and integrated versions are available.

Applications

  • IC Failure Analysis – e.g., front delayering, dielectric measurement after thinning
  • ITO / TCO layers – measurement of indium tin oxide layers and other transparent conductive oxides
  • Biomedical coatings – catheters, angioplasty balloons, stents, leads, needles, implants
  • OLED displays – OLED layers (emissive, injection, buffer, encapsulation)
  • Porous silicon – measurement of layer thickness, index, and porosity
  • Semiconductor process films – photoresists, oxides/nitrides, Si, and others

Parameters

F40 configuration – select the appropriate model according to the measurement range
F40 configuration – select the appropriate model according to the measurement range
Model Thickness range* Spectral range
F40 20 nm – 40 µm 400 – 850 nm
F40-UV 4 nm – 40 µm 190 – 1100 nm
F40-EXR 20 nm – 150 µm 400 – 1700 nm
F40-NIR 100 nm – 120 µm 950 – 1700 nm
F40-UVX 4 nm – 120 µm 190 – 1700 nm
F40-XT 0.4 µm – 250 µm 1440 – 1690 nm

* Depending on the material and lens.

Accessories

  • StageBase-XY10-Auto-100mm – tabletop XY stage with 100 mm stroke, motorized mapping, and autofocus
  • Film thickness standards – multi-value, NIST-traceable standards for calibration and accuracy verification
  • SS-Microscope-UVX-1 – microscope (15× reflective objective) with XY stage, UV source, and fiber optic illumination
  • SS-Microscope-EXR-1 – microscope with XY stage and illumination fiber (requires objective lens; light source assumed to be from F40)

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

tel: +420 601 123 593
mail: schuster@optixs.cz