Tencor® P-17 & Tencor® P-17 OF

The Tencor® P-17 is the eighth generation of tabletop stylus profilometers, built on more than 45 years of experience in surface metrology. This state-of-the-art system supports 2D and 3D measurements of step height, roughness, curvature, and stress for scans up to 200 mm without stitching.

Measurement stability is ensured by a combination of the UltraLite® sensor, constant force technology, and an ultra-flat scanning table. Measurement setup is quick and easy thanks to point-and-click table control, top and side optics, and a high-resolution camera with optical zoom.

The P-17 supports fully automated measurements, including pattern recognition, sequencing, and feature detection. The software includes a wide range of filters, leveling functions, and analytical algorithms for quantifying surface topography.

• Step Height: measurement of step height (2D/3D) from nanometers to 1000 µm – quantification of material after etching, sputtering, deposition, spin coating, CMP, etc. processes.
• Texture: measurement of roughness and waviness (2D/3D), calculation of RMS roughness.
• Form: measurement of curvature and shape of surfaces (2D/3D), e.g., wafers or optical lenses.
• Stress: measurement of thin film stress (2D/3D) using surface curvature change, calculation using Stoney's equation.
• Defect Review: measurement of defect topography (e.g., scratches), import of coordinates from KLARF files, and targeted 2D/3D measurement.

• Universities, research laboratories, and institutes
• Semiconductor and compound semiconductor industry
• LEDs (light-emitting diodes)
• Solar technology
• MEMS – microelectromechanical systems
• Data storage
• Automotive industry
• Medical devices
• And more (upon request)