Zygo ZeGage Pro™and ZeGage Pro HR™profilers and roughness meters are suitable for non-contact quantitative 3D profile and roughness measurements. The system's vibration-resistant design allows the profilometer to be placed directly on a workbench in a factory without the need for external isolation.
Key features
- Non-contact surface metrology without the need to modify the measured element
- Vibration resistance
- Affordable option for accurate measurements
- Measurement speed up to 171 um/s
- Up to sub-nanometer accuracy
- Wide choice of lenses
- 3D interactive surface maps
- Flexible metrology analysis
- Comprehensive Zygo Mx™ data visualization and analysis software
ZeGage Pro with nanometer and ZeGage Pro HR with sub-nanometer measurement accuracy meet ISO 25178 standard for 3D surface analysis. The high resolution of the camera ensures fast (within seconds) and accurate measurement of sample surface details. The profilometer is capable of performing 2D and 3D measurements on a variety of surfaces, including smooth, rough and rugged surfaces.
The supplied Mx™ software allows advanced analysis and visualization of the measured data, including the determination of metrological quantities such as roughness profile (Ra, Rz, Rq, etc.), negative and positive volume, and more.
